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79th IUVSTA Workshop: 3D Chemical Imaging – from fundamentals to advancing applications

15 – 19 May 2017, Hotel Flamingo Resort, Santa Margherita di Pula, Sardinia, Italy

This workshop will engage leading scientists in the area of 3D chemical imaging in a lively scientific debate to address fundamentals and important challenges for 3D secondary ion mass spectrometry (SIMS), FIB-SIMS and atom probe tomography.

Topics and Workshop Format

Industry is increasingly using 3D architectures, additive manufacturing and a rapidly-expanding library of materials. This creates a need for beyond state-of-the-art capabilities to measure chemical composition and interfacial properties with 3D-spatial resolution.

This meeting will focus on three rapidly-developing techniques where continued progress and uptake into industry depends crucially on improved understanding of fundamentals:

  1. 3D SIMS using sputtering by cluster ion beams. The advent of large gas cluster ions has revolutionised the capability, but major challenges continue for materials with different sputtering yields, novel approaches to boost sensitivity.
  2. FIB-SIMS tomography is essential for materials that are either mixed organic-inorganic or have voids. In its early stage of development, this approach needs the combined expertise of the SIMS and FIB community to reduce artefacts and provide a fundamental framework.
  3. Atom Probe Tomography (APT) is rapidly becoming a critical technique in the semiconductor industry for atomic resolution 3D chemical imaging but, as yet, there is no standards infrastructure. Pre-normative studies are urgently needed and these will be discussed. Novel applications of APT to inorganic-organic structures and organic materials could revolutionise 3D chemical imaging at the atomic scale.

The workshop will include invited and contributed presentations to stimulate debate. This is a forum where experts share their views and engage in in-depth discussions to identify and solve current challenges and issues. Participation is limited to 50 delegates.

Invited Speakers

  • Prof Arnaud Delcorte
    Universite Catholique de Louvain, Belgium
  • Dr Thomas Kelly
    CAMECA Instruments, USA
  • Dr Jean Paul Barnes
    CEA-LETI, France
  • Prof Wilfried Vandervorst
    Imec, Belgium
  • Prof Jiro Matsuo
    Kyoto University, Japan
  • Prof Francois Vurpillot
    Universite de Rouen, France
  • Dr Gregory Fisher
    Physical Electronics, USA
  • Dr Tom Wirtz
    Luxembourg Institute of Science & Technology, Luxembourg
  • Dr Felix Kollmer
    ION-TOF, Germany
  • Prof Ian Gilmore
    National Physical Laboratory, United Kingdom
  • Dr John Fletcher
    University of Gothenburg, Sweden

Workshop Organising Committee

Chair: Rasmus Havelund, National Physical Laboratory, UK
Co-chairs: Claudia Fleischmann, Imec, Belgium
Natascia de Leo, Istituto Nazionale di Ricerca Metrologica, Italy
Bonnie Tyler, University of Muenster, Germany
Senior Advisory Committee: Prof Wilfried Vandervorst (Imec), Dr Luca Boarino (INRiM),
Prof Antonella Rossi (University of Cagliari) and Prof Ian Gilmore (NPL)

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