Hiden Analytical Limited

+44 (0) 1925 445 225 http://www.HidenAnalytical.com

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EQS, a Secondary Ion Mass Spectrometer bolt on SIMS Analyser

State of the art, bolt-on SIMS probe for integration into your existing UHV surface science chamber. Suitable for FIB-SIMS integration and compatible with the Hiden SIMS Workstation

Features:
-High Sensitivity Pulse Ion Counting detector with 7 decade dynamic range
-Raster Control for enhanced depth profiling & imaging with integrated signal gating
-45° Electrostatic Sector analyser, scan energy at 0.05 eV increments/0.25eV FWHM
-Minimum perturbation of ion flight path & constant ion transmission at all energies
-Triple filter Quadrupole, mass options to 2500amu.
Penning Gauge & interlocks to provide over pressure protection
-Differentially pumped option for use in high pressure environments
-MASsoft control via RS232/RS485/Ethernet LAN
-Easily interfaced to existing systems

Applications:
-Static/Dynamic SIMS with energy analysis
-Integral front end ioniser for RGA
-Composition/contamination analysis
-Depth profiling
-Leak detection & desorbed gas analysis
-…

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