Hiden Analytical Limited

+44 (0) 1925 445 225 http://www.HidenAnalytical.com

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XBS Triple Filter Mass Spectrometer

Configured for multiple source monitoring in MBE deposition applications. Custom configured ioniser provides for high stability & senstivity monitoring of oxides & metals from k-cell & e-gun sources.

XBS Triple Filter Quadrupoles configured for multiple source monitoring in MBE deposition applications. The custom configured ioniser provides for high stability, high senstivity monitoring of oxides and metals from both k-cell and e-gun sources:
-MBE monitoring & control
-Molecular Beam Studies
-Multiple beam source analysis
-High Performance RGA
-Desorption/Outgassing studies/Bakeout cycles
-Chamber/Process gas Contaminants

Features Include:
-High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510amu
-Enhanced long-term Stability (<±0.5% height variation over 24h)
-Crossbeam ion source, beam acceptance through /-35° to transverse axis
-Ion source control for soft ionisation & appearance potential mass spectrometry
-Enhanced sensitivity for high mass transmission
-…

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