Hiden Analytical Limited

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Diagnostic Tools for Atomic Layer Deposition

Hiden Analytical offers a range of mass spectrometer products of special significance to  the process and post-process stages of atomic layer deposition (ALD) and evaluation.

Systems are available to monitor gaseous species through the pressure range from ultra- high vacuum through to the millibar regime, from in-process residual gas analysers through to the HPR-30ALD differentially pumped probes for the highest process pressures.
 
Plasma-assisted process diagnostics are addressed be the EQP-series plasma probes for direct in-plasma measurement of the molecular mass and energy of both positive and
negative process ions together with the abundance of neutrals and radicals. Energy range options extend to /-1000eV, and mass range options to 1000amu.
 
Secondary ion mass spectrometers (SIMS) are applicable to provide direct post-process validation of surface layer quality, providing both surface and depth profile species compositional data. Oxygen, argon and caesium ion guns are offered, with ion beam spot size down to 20 micron.

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 For full details on this or any other Hiden Products contact Hiden Analytical at info@hiden.co.uk or visit the main website: www.HidenAnalytical.com.

What’s new

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    Quadrupole probe analysers for UHV/XHV

    News | 13 Mar 2018

    The Hiden RGA series of quadrupole mass spectrometers for in-vacuum process analysis is further extended to include systems for applications from general vacuum monitoring through to specialised environmental and R&D applications.

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    New Compact HPR-20 Gas Analyser Family

    News | 14 Feb 2018

    Hiden Analytical introduce the new HPR-20 range of application-specific compact benchtop gas analysers for dynamic measurement of in-process gas composition.

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    Hiden Gas Analysers at PITTCON 2018 Conference & Expo

    News | 31 Jan 2018

    Booth 1360

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    New RGA for harsh radiation environments

    News | 29 Jan 2018

    High energy particle physics applications will typically involve particle enclosure in sophisticated evacuated beam guidance systems.

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    APSI mode simplifies MS spectral analysis

    News | 21 Dec 2017

    Analysis of gaseous species by quadrupole mass spectrometry involves ionisation of the molecular species most typically by the electron bombardment technique, the ionisation process creatingfragmentation ions additionally to the parent ion. Spectral interpretation can then be compromised by spectral interference in some gaseous mixtures.

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